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A thermally tunable Bragg grating device has been fabricated in a silica-on-silicon integrated optical chip, incorporating a suspended microbeam improving power efficiency. A waveguide and Bragg grating are defined through the middle of the microbeam via direct ultraviolet writing. A tuning range of 0.4 nm (50 GHz) is demonstrated at the telecommunication wavelength of 1550 nm. Power consumption during wavelength tuning is measured at 45 pm/mW, which is a factor of 90 better than reported values for similar bulk thermally tuned silica-on-silicon planar devices. The response time to a step change in heating is longer by a similar factor, as expected for a highly power-efficient device. The fabrication procedure involves a deep micromilling process, as well as wet etching and metal deposition. With this response, the device would be suitable for trimming applications and wherever low modulation frequencies are acceptable. A four-point-probe-based temperature measurement was also done to ascertain the temperature reached during tuning and found an average volume temperature of 48 °C, corresponding to 0.4 nm of tuning. The role of stress-induced buckling in device fabrication is included.
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Cooper et al. (2015) studied this question.
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