Microbolometer detector arrays for the infrared and terahertz ranges

This paper presents the results of the development of photodetectors for the IR and terahertz ranges, based on uncooled microbolometer detector arrays fabricated by the sol-gel technology. Detectors with a 320×240-element format are demonstrated, having a temperature resolution better than 100mK and a threshold power of 160pW∕pixel in the 8–14-μm range, with a response time of 12–16ms. The threshold power at a wavelength of 130μm was 33nW∕pixel for a terahertz image visualized in a 160×120 format at a rate of 90frame∕sec. A design was developed to match an antenna with an uncooled high-resistance integrated microbolometer, allowing the detector sensitivity to be significantly increased in the terahertz range.