Fabrication of Thermally Durable Sub-wavelength Periodic Structures upon Inorganic–Organic Hybrid Materials by Nano-imprinting

We fabricated sub-wavelength periodic structures by thermal nano-imprinting using our original functionally modified inorganic–organic hybrid materials. The fabricated structures exhibited excellent uniformity and surface smoothness over a large imprinted area. In addition, optical transmittance is more than 90% within visible wavelength regions after heat treatment for 2 h at 300 °C. These nano-imprinted periodic structures showed high thermal durability without any structural changes after heating for 2 h at 200 °C, which is superior to commercially available organic imprinting materials. These nano-imprinted sub-wavelength periodic structures using our original inorganic–organic hybrid materials offer great potential for several applications in microphotonic and nanophotonic devices.