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January 1, 2018ECS Journal of Solid State Science and Technology

SEM, AFM and TEM Studies for Repeated Irradiation Effect of Femtosecond Laser on 4H-SiC Surface Morphology at Near Threshold Fluence

Chengwu Wang Syuhei KUROKAWA Toshiro Doi Julong Yuan Li Fan Masatoshi Mitsuhara Huizong Lu Weifeng Yao Kehua Zhang

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Abstract

SEM, AFM and TEM Studies for Repeated Irradiation Effect of Femtosecond Laser on 4H-SiC Surface Morphology at Near Threshold Fluence, Wang, Chengwu, Kurokawa, Syuhei, Doi, Toshiro, Yuan, Julong, Fan, Li, Mitsuhara, Masatoshi, Lu, Huizong, Yao, Weifeng, Zhang, Yu, Zhang, Kehua

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Cite This Study

Wang et al. (2018) studied this question.

synapsesocial.com/papers/6ab77214b43f9cebc3700154 https://doi.org/10.1149/2.0421712jss

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