Research on laser-induced damage resistance of fused silica optics by the fluid jet polishing method

Laser-induced damage threshold (LIDT) is one important evaluation index for optical glasses applied in large laser instruments which are exposed to high light irradiation flux. As a new kind of precise polishing technology, fluid jet polishing (FJP) has been widely used in generating planar, spherical, and aspherical optics with high-accuracy surfaces. Laser damage resistances of fused silica optics by the FJP process are studied in this paper. Fused silica samples with various FJP parameters are prepared, and laser damage experiments are performed with 351 nm wavelength and a 5.5 ns pulse width laser. Experimental results demonstrate that the LIDT of the samples treated with FJP processes did not increase, compared to their original state. The surface quality of the samples is one factor for the decrease of LIDT. For ceria solution polished samples, the cerium element remaining is another factor of the lower LIDT.