A scanning ion microprobe system using a liquid-Ga ion source and a voltage-asymmetric three-electrode lens is developed. It produces 2–20 keV Ga+ beams of 0.1–5 μm diameter with 20 pA–8 nA current. Beam sizes are directly measured by a combined sharp-edge and Faraday cup mehtod. This optical system is well suited for variable energy microprobe applications.
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Ishitani et al. (1982) studied this question.