We have developed a bulk micromachined calorimeter with a sensitivity of 1.5nW∕Hz1∕2 and a 1ms time constant using a thin film thermopile as the sensing element. The thermopile consists of seven titanium and bismuth thermocouples with a total Seebeck coefficient of 574μV∕K. The device is capable of measuring enthalpies in chemical or biological reactions in volumes as small as a few picoliters. The device can be fabricated and operated in a massively parallel fashion in combination with ink-jet printing technologies in air and at room temperature, making it ideally suited for biological and biochemical experiments.
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Chancellor et al. (2004) studied this question.
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