In the three different FE (Flash Evaporation), IP (Ion-Plating) and IBS (Ion-Beam Sputtering), the IBS process exhibited the most clean RFe2 film with an amorphous like structure. In the FE process, the preparation process of the RFe2 powder should also taken into account because the composition of the alloy film depends on the purity of the powder. The IP process has a much higher deposition rate than the FE or IBS process, however, exhibits defficulty in the contral of the compositional changes. Further investigation using these processes are progress.
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Funakura et al. (1993) studied this question.
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