Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot

This paper presents the design, fabrication and calibration of a multi-axis micro force–torque sensor. The sensor and its readout electronics are specifically designed to simultaneously measure two force components and one torque component. The load is measured by capacitive comb drives which provide high sensitivity. The sensor is applied to measure micro-Newton level forces and nano-Newton-meter level torques on a magnetically actuated microrobot. This microrobot is assembled from microfabricated nickel parts and is designed for directed drug delivery inside the human body. The precise knowledge of the forces and torques will help design magnetic position controllers as well as understand the magnetic properties of the electroplated microparts.