Sum frequency generation of UV laser radiation at 266 nm in LBO crystal

We report experimental results of generation at 266 nm in LBO crystal by frequency mixing of the fundamental (1064 nm) and third harmonic (355 nm) of ytterbium pulsed fiber laser radiation. Deep ultraviolet (DUV) output power of 3.3 W at 266 nm was achieved with 14% IR-to-DUV conversion efficiency. UV-induced bulk degradation of LBO crystals was observed and visualized by the dark field method.