A CMOS optical microspectrometer with light-to-frequency converter, bus interface, and stray-light compensation

A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry-Perot (F-P) etalons (each one with different resonance cavity length), photodetectors, and circuits for readout, multiplexing, and driving a serial bus interface has been fabricated in a standard 1.6-/spl mu/m CMOS technology (chip area 3.9 /spl times/ 4.2 mm/sup 2/). The result is a chip that can operate using only four external connections (including V/sub dd/ and V/sub ss/) covering the optical range of 380-500 nm with FNVHM = 18 nm. Frequency output and serial bus interface allow easy multisensor, multichip interfacing using a microcontroller or a personal computer. Also, stray-light compensation techniques are implemented. Power consumption is 1250 /spl mu/W at a clock frequency of 1 MHz.