A UV excimer laser beam delivery system is designed with conventional microlens arrays and diffractive diffuse. Ultraflat and ultrasmooth ablated surfaces with sharp edges are obtained on fused silica. Ablated surfaces of a depth of 5.9 μm with less than 10 nm surface roughness are obtained on fused silica, as measured by an atomic force microscope.
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Andrew Feng Zhou (2011) studied this question.
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