Nanometer‐scale Catalyst Patterning for Controlled Growth of Individual Single‐walled Carbon Nanotubes

Periodic nanometer-scale patterning of sub-100 nm catalyst particles on silicon is used to grow carbon nanotubes via chemical vapor deposition from methane. The resulting structures consist of very straight individual single-walled carbon nanotubes that are preferentially aligned along perpendicular directions in the plane (see figure).