An efficient, damage resistant, guided wave deflector in LiNbO3 has been fabricated by a combination of titanium diffusion, proton exchange in benzoic acid with lithium benzoate, and post-annealing processes. The stability of the waveguide has been confirmed using x-ray rocking curves. The insertion loss of interdigital transducer and the diffraction efficiency were found to depend on the wave number of OH absorption produced by proton exchange.
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Miyawaki et al. (1985) studied this question.
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