Ionization Cross Sections of Silane and Disilane by Electron Impact

Partial ionization cross sections for silane and disilane by electron impact have been measured for electron energies in the range of threshold to 1000 eV using a crossed beam geometry and employing a pulsed electron beam and a pulsed ion extraction technique. The cross sections were normalized by using the relative flow technique. For ease of use in various plasma modeling we have fitted the cross sections to an empirical formula.