Design and performance of a simple, room-temperature Ga2O3 nanowire gas sensor

Ga 2 O 3 nanowire gas sensors were fabricated using the vapor-liquid-solid method of nanowire growth over platinum interdigitated electrodes. While cheaply and easily fabricated, the sensors are capable of detecting various analytes at room temperature. As analyte is adsorbed onto the nanowire surfaces, a change in the device capacitance is measured. Fast recovery of the sensing devices, without the use of an external heat source, allows these devices to operate at low power. Capacitance is seen to increase following a Freundlich isotherm in response to increasing concentrations of analyte vapors.