Shot-to-shot and average absolute photon flux measurements of a femtosecond laser high-order harmonic photon source

The absolute flux of a femtosecond vacuum-ultraviolet (VUV) photon source based on the high-order harmonic generation of a femtosecond Ti:sapphire laser and monochromatized with a grating monochromator is determined both on a shot-to-shot basis and averaged over seconds by a calibrated gas monitor detector. The average flux is compared with the average flux as determined with a calibrated GaAsP semiconductor photodiode. We found that the photodiode is a reliable and easy-to-use tool for estimating the order of magnitude of the average photon flux but that, due to saturation losses, it underestimates the average flux by up to −15%.