Scalable Magnonic Nanostructuring via Stabilized Lloyd’s Mirror Interference Lithography for Spin-Wave Metamaterials

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Scalable fabrication of functional magnetic nanostructures remains a major challenge for the development of spin-wave devices and magnonic metamaterials, where nanoscale geometrical precision, reproducibility, and scalable nanopatterning are essential. In this work, we demonstrate that a mechanically stabilized Lloyd’s mirror interference lithography platform enables the reliable fabrication of periodic CoFeB magnonic nanostructures over millimeter-scale areas using a simple and cost-effective process. The optimized optical and mechanical configurations provide reproducible control of the interference conditions and allow the fabrication of one- and two-dimensional (1D and 2D) magnetic architectures with tunable lattice parameters, including nanowires, antidot lattices, dot arrays, lace-like networks, and volcano-like structures. Structural characterization by atomic force microscopy and scanning electron microscopy confirms the nanopattern transfer, while ferromagnetic resonance and Brillouin light-scattering measurements reveal a substantially modified dynamic magnetic response in the patterned structures, characterized by multiple additional resonances and a spin-wave dispersion that differs from that of the continuous film. These results establish interference lithography as a versatile and scalable route for manufacturing functional magnonic nanomaterials and spin-wave metamaterials for future wave-based information processing technologies.