Spatial investigation of the electron energy distribution function of the high-energy electron beam sustained in the low-pressure microwave surface-wave plasma

The electron energy distribution functions are studied in low-pressure microwave surface-wave sustained plasma using retarding field analyzer. Sustained discharge can be considered as superposition of the bulk plasma and the high-energy electron beamlike part. The beam component energy is pronounced up to 40eV. Beam population reaches the maximum at energy of 16eV with amount of 4% of the bulk plasma population.