An ion source for generation of low-charged heavy ions has been developed using low-power KrF excimer and frequency-doubled Nd:YAG lasers. The ion source was examined with two experimental modes of low-voltage DC extraction at ∼20 kV and high-voltage pulse extraction at 150 kV. Normalized emittance of extracted beams composed of Cu+ and Cu2+ ions was measured to be about 0.05 and 0.8 πmm-mrad for the DC extraction and the pulse extraction, respectively. Electron temperature was observed by means of a single probe method to be 0.8 to 2.5 eV, depending on the intensity of the KrF laser.
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Yoshida et al. (2003) studied this question.
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