Low-Temperature Fabrication of Red Phosphor Ca0.997Pr0.002TiO3 Thin Film Using Excimer Laser Assisted Metal Organic Deposition

Ca 0.997 Pr 0.002 TiO 3 thin films that show strong red luminescence were successfully prepared by an excimer laser assisted metal organic deposition (ELAMOD) process at temperatures from 25 to 400 °C. Laser irradiation induced an oxygen deficiency in the film. Oxygen annealing at 500 °C eliminated the oxygen vacancy and remarkably improved the emission intensity. The crystallinity of the film prepared by the ELAMOD exceeded that of the film prepared by a conventional thermal metal organic deposition (MOD) process at 900 °C. The photoluminescence emission of the film prepared by the ELAMOD process at 250 °C followed by oxygen annealing at 500 °C was stronger than that of the film fabricated by the thermal process at 900 °C.