Texture control and interfacial structures of SrBi2Ta2O9 thin films on Pt

The influence of the Pt bottom electrode orientation on the growth of SrBi2Ta2O9 (SBT) films was elucidated in terms of the atomic matching at the SBT/Pt interfaces. A highly c-axis oriented SBT film was grown on the Pt (001) plane since the SBT (00l) plane conjugates well with the Pt (001) plane from a crystallographic point of view. Both the strong (105)tet and (110)tet SBT peaks were found in the x-ray diffraction profile when the SBT film was grown on the Pt (111) surface. It was found that not a single SBT plane can match with the whole Pt (111) plane due to the appreciably different atomic configurations. The cross-sectional transmission electron microscopy image revealed that the SBT/Pt interface was structurally stable after heat treatment at 750 °C.