Fine pitch transition-edge sensor X-ray microcalorimeters with sub-eV energy resolution at 1.5 keV

We are developing arrays of X-ray microcalorimeters on a 50-µm pitch that utilize transition-edge sensors as the sensor to measure the temperature rise when X-rays are absorbed. An array of this type of pixel has great potential for the study of point sources in future X-ray observatory missions. The pixels have gold absorbers with dimensions 45 × 45 × 4.2 µm3. We measured an energy resolution of 0.72 ± 0.03 eV full width at half maximum for the Al Kα complex in a subset of pixels within the array, which is the best resolution to date using a non-dispersive detector at this energy. We describe our characterization of this device including measurements of the heat capacity, thermal conductance to the heat bath, and the temperature and current sensitivity of the detector, and discuss its potential for improved performance.