Investigation of phase transition of Ge2Sb2Te5 and N-incorporated Ge2Sb2Te5 films using x-ray absorption spectroscopy

For this study, the phase-change materials Ge2Sb2Te5 and N-doped Ge2Sb2Te5 films were investigated using x-ray absorption near-edge structure and extended x-ray absorption fine structure. During the phase transition, change in electronic structure is observed by the shift of the absorption edge energy, i.e., structural coordination of Ge–Te changes from tetrahedral to octahedral coordination, of which the interatomic distances are 3.12 and 2.83Å, respectively. In addition, nitrogen incorporation into the film led to a p-p orbital hybridization and a different crystallization behavior. The hybridization caused by the formation of a Ge–N bond was related to suppression of the phase transition.