Fully integrated probe for proton nuclear magnetic resonance magnetometry

In this article, we present the first fully integrated nuclear magnetic resonance probe ever realized. Planar spiral coils, a radio-frequency preamplifier, a mixer, and an audio-frequency amplifier are integrated using a standard complementary metal–oxide–semiconductor technology on a single silicon chip of 10 mm2. A 1 mm3 solid sample of cis-polyisoprene, placed over one of the integrated coils, is used as resonating material. The realized integrated probe allows measurements of static magnetic fields from 0.7 to 7 T with a magnetic-field resolution better than 1 ppm/Hz1/2, an absolute accuracy better than 3 ppm, and a spatial resolution of about 1 mm.