A Linear Irradiance Control Power Supply for Dielectric Barrier Discharge-Based 222 nm Excimer Ultraviolet Lamps

The 222 nm excimer ultraviolet (UV) lamp emerges as a promising disinfection technology because it is harmless to human bodies. However, existing power supplies fail to achieve linear irradiance control due to the complexity of the irradiation process and indeterminate load characteristics, resulting in limited use in high-precision applications. The dielectric barrier discharge (DBD) and radiation principles of 222 nm excimer UV lamps are analyzed in this study, and the piecewise linearization load model of excimer UV lamps is established. A linear irradiance control power supply for 222 nm excimer UV lamps is proposed. The power supply consists of four parts: the flyback circuit, the LCC resonant circuit, the feedback loop, and the UV lamp load. The LCC resonant converter designed by the capacitive characteristics of UV lamps can filter out higher order harmonics and prevent voltage distortion. The irradiance of the excimer UV lamp is linearly controlled by controlling the frequency of the resonant converter, and a sine output voltage waveform with a constant peak value of 4 kV is obtained through a flyback circuit with a feedback loop. Besides, in order to verify the proposed control, a simulation model is established by using SIMPLIS software. Finally, a linear irradiance control power supply prototype is implemented to verify the feasibility of the proposed method, and the coefficient R2of determination for evaluating irradiance linearity is 0.9996.