A Bipolar Short-Pulsed Power Supply With Charge Feedback for a DBD Excimer Lamp

Generating an optimal excitation voltage for a dielectric barrier discharge (DBD) load with a simple structure remains a significant challenge. To address this issue, this article presents improvements to a high-voltage high-frequency converter and proposes a novel bipolar short-pulsed power supply integrated with charge feedback. Specifically, by replacing the two resistance–capacitance (RC) snubber circuits in the original converter with two charge feedback circuits, the proposed power supply achieves three key enhancements: a sharp increase in the efficiency of the original converter, further suppression of excitation voltage oscillations, and a notable improvement in the rising rate of the excitation voltage. Additionally, the proposed power supply inherits the inherent advantages of the original converter, including the stable generation of bipolar excitation voltage, smooth adjustability of the excitation voltage idle time, and strong adaptability to different DBD excimer lamps. Experimental validation was conducted on a DBD excimer lamp. Under operating conditions of 100kHz, 17kV, and 90W, the power supply achieved an efficiency of 93%. The average voltage rise rate reached10.638× 10⁹V/s, representing a 30% improvement over the original converter.