AIM‐Photonics Visible‐to‐Near‐Infrared Silicon‐Nitride‐Based Silicon‐Photonics Platform and Component Library

Silicon‐photonics platforms operating at visible and near‐infrared wavelengths are essential for a growing range of applications, including biosensing, chemical detection, Raman spectroscopy, quantum, optogenetics, and displays. However, unlike their infrared counterparts, visible‐wavelength platforms have lacked comprehensive component libraries with pre‐characterized devices, limiting the ability to rapidly design photonic integrated circuits for these applications. In this work, we present the design, fabrication, and broadband experimental characterization of a comprehensive visible‐to‐near‐infrared‐spanning component library for the AIM‐Photonics 300‐mm‐wafer silicon‐nitride‐based platform, which features two silicon‐nitride waveguiding layers, a sensing trench, thermo‐optic phase shifters for modulation, and a dicing trench for fiber‐to‐chip edge coupling. We design and characterize components for both the fundamental quasi‐transverse‐electric and quasi‐transverse‐magnetic modes for wavelengths spanning from 450 to 1000 nm. To enable this characterization, we utilize a spectrum‐spanning broadband measurement setup and methodology. The component library includes passive waveguides, edge couplers, grating couplers, multimode‐interferometer splitters, directional couplers with varying splitting ratios, waveguide crossings, interlayer‐transition escalators, polarization rotators, polarization splitters, sensing‐trench components, and thermo‐optic phase shifters. This work provides a foundry‐compatible pre‐characterized library of photonic building blocks that enables the rapid design and deployment of visible‐to‐near‐infrared photonic integrated circuits for sensing, quantum, biomedical, display, and other emerging applications.