Femtosecond laser micromachining (FLM) has emerged as a powerful technique for the precise fabrication of optical components, enabling high-resolution structuring in transparent materials such as fused silica and borosilicate glass. The nonlinear absorption mechanisms involved allow for localized modifications at the microscale with minimal thermal effects. In this work, we demonstrate the application of FLM for the fabrication of integrated optical beam splitters and microlenses. By carefully controlling laser parameters and subsequent post-processing steps, we achieve structures with high optical quality and functional performance. The results demonstrate the potential of femtosecond laser technology in integrating complex optical components, opening new possibilities for the development of lab-on-chip systems.
Ciceri et al. (Wed,) studied this question.