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September 19, 20250 citations

High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

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JYJie YangZXZefeng XuCZChangfeng Zeng

Key Points

  • This method results in ultra-low-loss lithium niobate waveguides at 0.28 dB/cm, enhancing their performance for photonic applications.
  • High-Q microrings were achieved with a quality factor of 1.4×10⁶, indicating excellent optical resonance properties.
  • The hybrid method employs both dry etching and wet polishing techniques, combining their strengths for improved fabrication.
  • The scalability of this technique may enable broader integration of lithium niobate in photonic network systems.

Abstract

We introduce a CMOS-compatible hybrid method combining dry etching and wet polishing, achieving ultra-low-loss lithium niobate waveguides (0.28 dB/cm) and high-Q microrings (Q = 1.4×10⁶), enabling scalable integration of lithium niobate photonic networks.

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Cite This Study

Yang et al. (2025) studied this question.

synapsesocial.com/papers/68d464f131b076d99fa64402https://doi.org/10.1364/cleo_at.2025.jps200_46
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