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This approach achieves ultra-low-loss waveguides and high-Q microrings, suggesting scalable integration in photonic networks.
We introduce a CMOS-compatible hybrid method combining dry etching and wet polishing, achieving ultra-low-loss lithium niobate waveguides (0.28 dB/cm) and high-Q microrings (Q = 1.4×10⁶), enabling scalable integration of lithium niobate photonic networks.
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Yang et al. (2025) studied this question.
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