Wafer-scale fabrication of low-loss lithium niobate integrated photonic devices

Lithium niobate, and more recently thin film lithium niobate on insulator (LNOI, TFLN), is a widely used material in integrated photonics due to its excellent optical and electro-optic properties. With the increasing demand for high-speed, high integration density photonic devices, lithium niobate integrated photonics has become an active research area. The focus of the presented technology development is on low-loss waveguides (below 0.1 dB/cm) that enable the integration of a wide variety of devices, including modulators, resonators and frequency converters, on a single chip for applications in quantum technologies. Implications and challenges of wafer-scale fabrication will be discussed.