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In many applications, such as space navigation, metrology, testing, and geodesy, it is necessary to measure accelerations with frequencies ranging from fractions of a hertz to several kilohertz. For this purpose, optomechanical sensors are used. The natural frequency of such sensors should be approximately ten times greater than the frequency of the measured acceleration. In the case of triaxial acceleration measurements, a planar design with two sensors that measure accelerations in two perpendicular in-plane directions and a third sensor that measures out-of-plane acceleration is effective. The mechanical characteristics of the existing designs of both in-plane and out-of-plane types of sensors were analyzed, and the improved designs were elaborated. Using numerical simulation, the dependencies of the natural frequency level in the range from several hertz to tens of kilohertz on the designs and geometric parameters of opto-mechanical accelerometers were modeled. This allows one to select the accelerometer design and its parameters to measure the acceleration at the assigned frequency. It is shown that the opto-mechanical accelerometers of the proposed designs have reduced dissipation losses and crosstalk.
Rezinkina et al. (Sun,) studied this question.