考虑磨粒轨迹和研磨垫磨损均匀性的研磨盘转速优化

Key Points

• The aim is to determine the optimal polishing disc speed based on its effects on abrasive trajectories and pad wear uniformity.
• Analyzed the effect of disc speed on abrasive trajectories and wear uniformity.
• Quantified the coordinates of abrasives on the pad using coordinate transformation.
• Established equations for abrasive motion and assessed trajectory uniformity.
• Conducted experiments on fused quartz polishing under varying disc speeds.
• Increased disc speed improves both abrasive trajectory uniformity and pad wear uniformity until a critical speed.
• At a speed of 46 r/min, the surface roughness and flatness reached optimal values.
• Surface roughness (Sa) measured at 112.31 nm and flatness (PV) at 4.26 μm were achieved.