What question did this study set out to answer?

The aim is to develop a controllable synthesis method for multilayer hexagonal boron nitride films.

February 28, 2026Nanoscale0 citations

Growth of centimeter-scale multilayer hexagonal boron nitride films by metal-boride-vapor CVD

JLJiawen Liu PSPing Yan Sui CLChenxi Liu

Key Points

The aim is to develop a controllable synthesis method for multilayer hexagonal boron nitride films.
Utilized metal-boride-vapor chemical vapor deposition (CVD) technique
Focused on achieving atomically smooth surfaces
Investigated optical properties of spin defects in the films
Successfully produced multilayer h-BN films
Films exhibited atomically smooth surfaces
Demonstrated presence of optically addressable spin defects

Abstract

Multilayer hexagonal boron nitride (h-BN) films with atomically smooth surfaces and optically addressable spin defects are highly attractive for nanoelectronics, quantum sensors, and quantum memories. However, the controllable synthesis of...

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