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Enhancing beam coherence in low-voltage SEM: A novel approach for laminar flow characterization and electrode optimization | Synapse
March 3, 2026
Enhancing beam coherence in low-voltage SEM: A novel approach for laminar flow characterization and electrode optimization
YZ
Yixu Zhang
Guilin University of Electronic Technology
HH
Haibin Hu
YX
Yiyuan Xie
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Key Points
Enhanced beam coherence improves accuracy for laminar flow measurements, leading to better electrode performance.
The approach reveals notable improvements in measurement precision and reliability across various conditions.
Observational analysis using low-voltage scanning electron microscopy aids in characterizing flow dynamics effectively.
Support for electrode optimization is crucial, as it could influence the efficiency of various low-voltage applications.
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Cite This Study
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Zhang et al. (Sat,) studied this question.
synapsesocial.com/papers/69a76121c6e9836116a2ec49
https://doi.org/https://doi.org/10.1016/j.vacuum.2026.115185