A MEMS comb drive resonator with electrically tunable nonlinearity

Key Points

• The resonator shows enhanced tunability with electrical input, allowing unique control of its nonlinearity.
• Key evidence demonstrates that tuning achieved up to 60% variability in its characteristics across different states.
• Experimental analysis of the device focuses on its MEMS characteristics and applied electrical signals for nonlinearity adjustments.
• This development supports future innovations in MEMS technology, especially for applications requiring precise tuning.