The effect of Cu doping on the structures, electric properties, and optical properties of the WO3 thin films prepared through magnetron HiPIMS and radio frequency co-sputtering

Key Points

• Copper doping improves the electric properties of WO3 thin films, enhancing conductivity significantly.
• The study finds that the optical properties are also positively influenced, resulting in better light absorption.
• Assessment using HiPIMS and co-sputtering techniques demonstrates effective control over the film properties.
• These findings highlight the potential for optimizing thin films in various technological applications.