This research aims to explore the atomistic processes involved in the photoresist photolysis under extreme ultraviolet (EUV) light.
Simulations based on density functional theory are employed to analyze photolysis processes.
Temporal dynamics of the reaction are tracked to understand the mechanisms at play.
The study uncovers how residual kinetic energy influences phenyl ring rotation during photolysis.
The findings indicate the importance of simulating processes with density functional theory accuracy to gain deeper insights.
Abstract
), and residual kinetic energy induces phenyl ring rotation. Our method provides a new way to simulate the photolysis processes based on density functional theory accuracy.