High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

Key Points

• This method results in ultra-low-loss lithium niobate waveguides at 0.28 dB/cm, enhancing their performance for photonic applications.
• High-Q microrings were achieved with a quality factor of 1.4×10⁶, indicating excellent optical resonance properties.
• The hybrid method employs both dry etching and wet polishing techniques, combining their strengths for improved fabrication.
• The scalability of this technique may enable broader integration of lithium niobate in photonic network systems.