What type of study is this?

This is a Experimental Study study.

September 19, 2025

High-Q Lithium Niobate Microrings Enabled by a Hybrid Dry Etching and Wet Polishing Technique

Key Points

This method results in ultra-low-loss lithium niobate waveguides at 0.28 dB/cm, enhancing their performance for photonic applications.
High-Q microrings were achieved with a quality factor of 1.4×10⁶, indicating excellent optical resonance properties.
The hybrid method employs both dry etching and wet polishing techniques, combining their strengths for improved fabrication.
The scalability of this technique may enable broader integration of lithium niobate in photonic network systems.

Abstract

We introduce a CMOS-compatible hybrid method combining dry etching and wet polishing, achieving ultra-low-loss lithium niobate waveguides (0.28 dB/cm) and high-Q microrings (Q = 1.4×10⁶), enabling scalable integration of lithium niobate photonic networks.

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Cite This Study

Yang et al. (Wed,) studied this question.

synapsesocial.com/papers/68d464f131b076d99fa64402 https://doi.org/https://doi.org/10.1364/cleo_at.2025.jps200_46

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