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Sustainability is becoming more challenging for semiconductor industry as the size of foundries and complexity of wafer fabrication increase 1, 2 . When we look at the commercial and sustainability side of semiconductor manufacturing, we need to define methods and indicators to measure both. This paper describes a method and model to measure the efficiency for any semiconductor process step. With this model, it is possible to compare, track, and benchmark the sustainability characteristic of a manufacturing process step and flow overall.
Qi et al. (Mon,) studied this question.