Sustainability Model for Semiconductor Manufacturing

Sustainability is becoming more challenging for semiconductor industry as the size of foundries and complexity of wafer fabrication increase [1], [2] . When we look at the commercial and sustainability side of semiconductor manufacturing, we need to define methods and indicators to measure both. This paper describes a method and model to measure the efficiency for any semiconductor process step. With this model, it is possible to compare, track, and benchmark the sustainability characteristic of a manufacturing process step and flow overall.