Building a net-zero semiconductor ecosystem needs cleaner energy to operate fabs, low-carbon footprint tools & equipment and collaboration across the supply chain to reduce emissions. Applied Materials approach to build energy efficient semiconductor manufacturing tools considering the complete footprint of the system enables us to identify the real and significant contributors to our products' carbon footprint. This knowledge allows us to optimize the equipment operation and utilities and provide significant reduction in overall energy consumption.
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Ayalasomayajula et al. (2024) studied this question.
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