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ASML (United States)

h-index: 15
Total citations: 1,166
Total papers: 191

Homepage: https://www.asml.com/

Recent papers from ASML (United States)

Pupil, mask, wavefront co-optimization for enhanced EUV patterning: reducing LWR and evaluating overlay2025
Overlay metrology performance of dry photoresist towards high-NA EUV lithography2024
Elastic and inelastic cross section of tin ions in an extreme ultraviolet lithography source2024
Benefits and limitations of immersion lithographyJournal of Micro/Nanolithography MEMS and MOEMS · 2004
Forbidden pitches for 130-nm lithography and belowProceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000