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Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

  • h-index: 173
  • Total citations: 381,621
  • Total papers: 16,879
  • Impact factor: 2.1985940246045694
JOV

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Journal
H-Index = 173
Citations = 381.62K+

Papers

Evidence

Recent papers in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

  1. On the Cl2 plasma etching mechanisms of AlN micropillars: Carrier wafer impactJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  2. Phase formation and thermal stability of superconducting platinum silicide thin films on siliconJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  3. Optimizing the bromide incorporation in mixed-halide Cs x FA1− x Pb(I1− y Br y )3 perovskites for improving solar cell performanceJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  4. Unprecedented high-impact solid particle erosion of borided Inconel 718: Surface degradation and statistical damage assessmentJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Thu,
  5. Understanding sidewall passivation composition of single-step non-Bosch processes for deep Si etch using alternative gas mixturesJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  6. Inductively coupled plasma driven by asymmetric triangular current waveformJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  7. Integrating area-selective catalytic PMMA etching with PMMA-inhibited area-selective deposition of HfO2Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  8. Fast-neutron irradiation response of β-Ga2O3 Schottky barrier diodes on sapphire substrateJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,
  9. Effect of WC–TiC content on microstructure and properties of the coatings prepared by plasma transfer arc welding on Ti–6Al–4V alloyJournal of Vacuum Science & Technology A Vacuum Surfaces and Films · Mon,
  10. Selective physisorption ALD-like process and selective PECVD process for smoothing metal organic resist using SO2Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · Tue,

About Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films carries 16,879 indexed papers, 381,621 citations, h-index 173 in Synapse's enriched corpus. Each paper indexed here includes structured clinical evidence extraction (PICO), methodology classification with level of evidence, and links to related guideline recommendations where applicable.

On Synapse's credibility score (derived from SJR ranking and cross-citation patterns), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films sits among the highest-credibility cardiovascular journals.

Use the feed below to follow new Journal of Vacuum Science & Technology A Vacuum Surfaces and Films publications with AI-enriched analysis — each paper is decomposed into study design, population, intervention, comparator, primary outcome, and key finding, with the underlying evidence traceable to the primary source.

Deterministic synthesis from Synapse's enriched records — 122 words.