Dependence of capacitance–voltage curve of ferroelectric nanocapacitor on electrode size

Nanoscale characterization of ferroelectric behavior is essential for understanding and optimizing next-generation device applications. In this study, we demonstrate that key parameters derived from spatially resolved capacitance–voltage ( C – V ) measurements can provide reliable insights into local ferroelectric properties. Scanning nonlinear dielectric microscopy was used to observe single-crystal LiTaO 3 nanocapacitors. We obtained butterfly-shaped C – V curves whose amplitudes scaled with electrode area, while peak voltages remained nearly independent of size. The extracted parameters showed strong consistency with macroscopic electric field hysteresis results. A Landau-based phenomenological model and numerical electric field simulations provided insights into the observed C – V characteristics and their dependence on electrode geometry. These findings confirm that spatially resolved C – V analysis serves as a reliable and semi-quantitative approach for probing nanoscale ferroelectric switching behavior.