High Reliability Flexible Hybrid Integrated Temperature Sensor

To meet the needs of wearable devices and flexible electronic skin for curved, flexible temperature sensors, this paper presents a high-reliability flexible hybrid-integrated temperature sensor. Its core includes a CMOS sensor chip with an integrated bandgap reference circuit and dual-path ESD protection. The sensor achieves a low temperature drift of 20 ppm/℃ and 0.99% linearity from -40℃ to 125℃. After flexible integration and 100 bending cycles at a 10 mm radius, the reference voltage varies less than 0.1%, and temperature output shifts less than ±0.5℃. Temperature tests show an accuracy within ±1℃ across the full range, providing a precise and mechanically robust temperature monitoring solution.