Dual-stator ultrasonic motor achieving 2-DOF linear and rotary motion with single-phase excitation

This study proposes a novel dual-stator linear-rotary ultrasonic motor. The piezoelectric ceramic excites both out-of-plane and in-plane vibration modes within the stator. These distinct vibration modes independently drive the slider (rotor), generating reciprocating linear and rotational motions, respectively. Finite element analysis and laser vibrometer-based vibration testing validated the motor's operational principle. The close agreement between simulated and measured resonant frequencies for both vibration modes, with mere discrepancies of 3 % and 4 %, respectively, underscores the accuracy of the stator’s vibrational characteristics. Subsequently, two stators are fabricated and assembled to the ultrasonic motor prototype. Experimental results demonstrate the motor’s impressive performance, achieving a maximum linear velocity of 265 mm/s and a peak rotational speed of 1600 rpm. Furthermore, the motor delivers a maximum thrust force of 0.18 N and a stalling torque of 1.8 mN·m.