Axial ultrasonic assisted grinding characteristics and damage mechanism of RB-SiC

The influence of axial ultrasonic vibration (AUV) on the surface and subsurface damage characteristics of reaction-bonded silicon carbide (RB-SiC) was analysed through the comparative experiments of Axial ultrasonic assisted end grinding (AUAEG) and conventional grinding (CG) under different grinding parameters, the results show that the surface of RB-SiC after AUAEG has brittle and plastic mixed characteristics simultaneously. AUV can improve the surface quality of the mixed phase but also provides more energy for crack nucleation and propagation, causing more material to fall out and increasing the depth of damage. Under the same conditions, the surface roughness of AUAEG is 10% to 35% greater than that of CG.